Article ID Journal Published Year Pages File Type
7907422 Optical Materials 2018 8 Pages PDF
Abstract
This study reported the fabrication of a large area of micro/nano structures with different morphologies and sizes by the deposition of ablated material and melting of material on silicon through a line-shaped femtosecond laser beam irradiation. The evolution of micro/nano structures on the silicon surface was demonstrated with the laser fluence of 0.64 J/cm2. It was found that the melting of material was responsible for the formation of the micro-protrusions from laser-induced periodic surface structures (LIPSSs). Additionally, the deposition fell on the surface of the micro-protrusions in oblique incidence way, causing LIPSSs obscure and even invisible. As a consequence, those micro-protrusions gradually evolved into the micro-spikes with the ladder-like surface. Then, various laser fluences were applied to regulate the deposition and melting behaviors of silicon, to obtain the micro/nano structures with different morphologies and sizes. The formation mechanism of these micro/nano structures was analyzed. On this basis, the optical properties test showed that best anti-reflectivity was referred to the sample full of micro-spikes with the ladder-like surface, and the average reflectance has decreased from ∼38.17% of the planar silicon to∼4.75% in the waveband between 300 and 1000 nm.
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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