Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7907422 | Optical Materials | 2018 | 8 Pages |
Abstract
This study reported the fabrication of a large area of micro/nano structures with different morphologies and sizes by the deposition of ablated material and melting of material on silicon through a line-shaped femtosecond laser beam irradiation. The evolution of micro/nano structures on the silicon surface was demonstrated with the laser fluence of 0.64â¯J/cm2. It was found that the melting of material was responsible for the formation of the micro-protrusions from laser-induced periodic surface structures (LIPSSs). Additionally, the deposition fell on the surface of the micro-protrusions in oblique incidence way, causing LIPSSs obscure and even invisible. As a consequence, those micro-protrusions gradually evolved into the micro-spikes with the ladder-like surface. Then, various laser fluences were applied to regulate the deposition and melting behaviors of silicon, to obtain the micro/nano structures with different morphologies and sizes. The formation mechanism of these micro/nano structures was analyzed. On this basis, the optical properties test showed that best anti-reflectivity was referred to the sample full of micro-spikes with the ladder-like surface, and the average reflectance has decreased from â¼38.17% of the planar silicon toâ¼4.75% in the waveband between 300 and 1000â¯nm.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Tong Chen, Wenjun Wang, Tao Tao, Xuesong Mei, Aifei Pan,