Spatially correlated electron microscopy and atom probe tomography: Current possibilities and future perspectives

Performing electron microscopy and atom probe tomography at the same location on the same specimen combines the strengths of electron microscopy, which is primarily the analysis of defects and crystal structures, with the strengths of atom probe tomography, which is primarily the robust, accurate and sensitive three dimensional compositional analysis. This viewpoint article provides a summary of the broad range of electron microscopy techniques that have been performed on atom probe specimens to date. It describes what technique is best suited to address a specific materials science question and finishes with an outlook on possible future developments in the field.