| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7919302 | Energy Procedia | 2017 | 5 Pages |
Abstract
SINGULUS TECHNOLOGIES AG has been dedicated to realizing multiple HJT-projects worldwide up to gigawatt dimension. In this contribution key equipments including advanced wet-chemical texturing and cleaning processes based on ozone (O3) and PVD (Physical Vapour Deposition) for ITO (Indium Tin Oxide) layers are reviewed, which are developed and optimized together with industrial and institutional partners.
Keywords
Related Topics
Physical Sciences and Engineering
Energy
Energy (General)
Authors
Zhenhao Zhang, Marco Huber, Mirza Corda,