Article ID Journal Published Year Pages File Type
7923572 Materials Chemistry and Physics 2011 9 Pages PDF
Abstract
▶ Growth of crystalline anatase TiO2 can be controlled by % O2 and sputtering power. ▶ Agglomeration of TiO2 nano-sized grains is observed and rises with decrease in % O2. ▶ Nano-sized grains promote the formation of porous TiO2 films. ▶ Deposition parameters have great influence on the optical properties of TiO2 films.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Preview
Influence of O2 partial pressure on the growth of nanostructured anatase phase TiO2 thin films prepared by DC reactive magnetron sputtering
Authors
, , , ,