Study on the consistency of the voxel of two photon polymerization with inclined beam

In the process of two photon polymerization, the focused beam should be perpendicular to the materials to be processed. But actually it is hard to control, because of the errors of the optical system and the three-dimensional motion platform. So, the inconsistencies of voxels in size and angle due to the errors mentioned above will seriously impact the surface quality of the products. In this paper, the size, angle and location of the titled voxels formed by inclined beam are simulated according to matrix optics and polymerization theory. According to the simulation results, a method for angle errors compensation with the aid of scanning galvanometer is proposed. Although the angle of the voxels can be controlled by scanning galvanometer, but the deflection angles of the scanning galvanometer have a certain range, it should be lower than 3°, or the deformation of the voxels will be serious. Therefore the consistency of the voxel in both size and angle will be ensured.