Coupling structure for silicon slot waveguide operating at 1064Â nm

A coupling structure with a shape of isosceles trapezoid is experimentally demonstrated for injecting lightwave into silicon slot waveguide operating at 1064 nm. A transfer waveguide is adopted to mimic a silicon emitter and the coupling losses of varied mode sizes of incident lightwave are measured. According to experimental results, the low coupling loss region of “<1 dB” is obtained with varied structural parameters. Furthermore, the loss mechanism of our proposed coupling structure is also analyzed.