The fabrication of 10-channel DFB laser array by SAG technology

A 10 channel distributed feedback (DFB) laser array integrated monolithically with a 10×1 MMI combiner was fabricated by selective area growth (SAG) technique combined with butt-joint regrowth technique. In the device, Ti thin film heaters were integrated with a novel procedure, which simplifies the fabrication of such heaters greatly. A large electrical resistance of the heaters is obtained at the same time, resulting in a high wavelength tuning efficiency. By fine tuning the emissions of the laser array, a uniform 1.29 nm channel spacing is achieved. The measurement results indicate that the fabrication process is promising for reducing the cost of multi-channel laser arrays.