Article ID Journal Published Year Pages File Type
7934774 Progress in Natural Science: Materials International 2017 5 Pages PDF
Abstract
The piezoelectric properties of [Ba(Zr0.2Ti0.8)O3]-0.5(Ba0.7Ca0.3TiO3) (abbreviated as BZT-0.5BCT) thin films deposited on Pt/Ti/SiO2/Si substrates are reported in the present investigation. The effect of the distances between the target and substrate (d) on the morphology and out-of-plane piezoelectric properties was investigated. The experimental results showed that the ferroelectric domains size was dependent on the distance between the substrate and target and the ferroelectric domain growth was constrained by the grains. The samples exhibited well-defined out-of-plane butterfly loops and hysteresis loops and the one with d of 6.5 cm possessed the optimal ferroelectric properties and it exhibited good in-plane piezoelectric properties.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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