Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7938649 | Superlattices and Microstructures | 2018 | 21 Pages |
Abstract
This work reports fabrication and characterization of Film Bulk Acoustic Resonator (FBAR) to improve the performance characteristics for RF filter and sensing application. Zinc oxide as a piezoelectric (PZE) material was deposited on an aluminum bottom electrode using an RF magnetron sputtering, at room temperature, and gold as top electrode for the resonator. Tetramethyl ammonium hydroxide (TMAH) setup was used for bulk silicon etching to make back side cavity to confine the acoustic signals. The transmission characteristics show that the FBARs have a central frequency at 1.77â¯GHz with a return loss of â10.7â¯dB.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Raju Patel, Deepak Bansal, Vimal Kumar Agrawal, Kamaljit Rangra, Dharmendar Boolchandani,