| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7941562 | Superlattices and Microstructures | 2016 | 8 Pages |
Abstract
In this study, deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) have been fabricated. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Pd has been evaporated on the O-/F-diamond surfaces to form Schottky contact, whose barrier heights have been investigated by X-ray photoelectron spectroscopy technique. Deep-ultraviolet detector based on F-diamond shows lower dark current than that based on O-diamond.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
F.N. Li, J.W. Zhang, X.L. Wang, Z.C. Liu, W. Wang, J. Fu, T.F. Zhu, H.X. Wang,