A template-free CVD route to synthesize hierarchical porous ZnO films

Unique porous ZnO films were successfully synthesized on Si substrates without any catalysts or templates using chemical vapor deposition method. Unlike earlier reports, they are hierarchical porous, containing both macropores and mesopores. The zinc oxide seed layer and the weight ratio of source materials were found to be the major factors that would facilitate the synthesis of these hierarchical porous films. We found that all the macropores were surrounded by grain boundaries. As presented in the SEM images, the newborn ZnO atoms would prefer to adsorb nearby the grain boundaries and nucleate there in the growth stage. A schematic diagram based on the aforesaid phenomenon was proposed to explain the synthesis of the hierarchical porous ZnO film. An unusual strong emission peak located at 420 nm was observed in the photoluminescence spectrum. It was suggested that the emission peak was attributed to the special hierarchical porous structure, especially the grain boundaries in the nanowalls of these films.