Article ID Journal Published Year Pages File Type
7943073 Superlattices and Microstructures 2013 7 Pages PDF
Abstract

- A graded ZnO homojunction with different N incorporation was fabricated.
- The process utilizes industrial compatible sputtering process that can be deposited over large area substrates.
- Low temperature process that is suitable for plastic substrates.
- The whole device fabrication can be realized using just a single Zn:Al target.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Preview
Room temperature deposition of graded ZnO homojunction from a single sputter target
Authors
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