| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7952628 | Nano Energy | 2018 | 26 Pages |
Abstract
The single- and two-stage free-standing planar thermoelectric microrefrigerators based on nano-grained SiGe thin films have been developed for on-chip refrigeration. The free-standing design that completely eliminates the parasitic heat loss, improved metal contact, and the IC-compatible SiGe films with nanograin-enhanced thermoelectric properties lead to high cooling performance and excellent compatibility for on-chip integration.263
Keywords
Related Topics
Physical Sciences and Engineering
Energy
Energy (General)
Authors
Yu Su, Jianbiao Lu, Daniel Villaroman, Dezhao Li, Baoling Huang,