| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7961854 | Computational Materials Science | 2012 | 12 Pages |
Abstract
⺠We examine the mechanical properties of SiOxHyCz films deposited by PECVD. ⺠The analysis is performed with a Rechtshaffner design of experiments. ⺠Transfer functions linking process parameters and mechanical responses are obtained. ⺠The models are interpreted and validated by analysis of variance. ⺠A desirability approach allows to converge towards a multi-criteria optimum.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Computational Mechanics
Authors
Xavier Landreau, Pierre Chagnon, Christelle Dublanche-Tixier, Cédric Jaoul, Pascal Tristant,