| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7962250 | Computational Materials Science | 2012 | 6 Pages |
Abstract
⺠AlN and TiN layers are always in tension and compression at interface, respectively. ⺠Curvature of the bending is largest for the TiN/AlN thickness ratios â¼0.5 and â¼2. ⺠Curvature is maximum for equal number of TiN and AlN layers in multilayer film. ⺠Curvature is decreases with increasing the no. of TiN/AlN periods in multilayer film. ⺠Top layer and sample geometry plays critical role on the coherency stress profile.
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Physical Sciences and Engineering
Engineering
Computational Mechanics
Authors
Vipin Chawla, David Holec, Paul H. Mayrhofer,