Article ID Journal Published Year Pages File Type
798566 Journal of Materials Processing Technology 2009 7 Pages PDF
Abstract

Plasma immersion ion implantation (PIII) was used to implant nitrogen into Al at a temperature in the range of 320–520 °C. AlN phase was observed for temperatures above 450 °C, whereas no AIN detected by XRD diagnosis at temperatures below 380 °C. It was also observed that there was no effective increase in hardness of the material, but some wear resistance due to formation of AlN.

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Physical Sciences and Engineering Engineering Industrial and Manufacturing Engineering
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