Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7986490 | Micron | 2016 | 14 Pages |
Abstract
Focused electron beam induced deposition (FEBID) is a microscopic technique that allows geometrically controlled material deposition with very high spatial resolution. This technique was used to create a spiral aperture capable of generating electron vortex beams in a transmission electron microscope (TEM). The vortex was then fully characterized using different TEM techniques, estimating the average orbital angular momentum to be â¼0.8â per electron with almost 60% of the beam ending up in the â = 1 state.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
A. Béché, R. Winkler, H. Plank, F. Hofer, J. Verbeeck,