Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7986652 | Micron | 2015 | 12 Pages |
Abstract
The recent development of atomic resolution, low dose-rate electron microscopy allows investigating 2D materials as well as catalytic nano particles without compromising their structural integrity. For graphene and a variety of nanoparticle compositions, it is shown that a critical dose rate exists of <100Â eâ/Ã
2Â s at 80Â keV of electron acceleration that allows maintaining the genuine object structures including their surfaces and edges even if particles are only 3Â nm large or smaller. Moreover, it is demonstrated that electron beam-induced phonon excitation from outside the field of view contributes to a contrast degradation in recorded images. These degradation effects can be eliminated by delivering electrons onto the imaged area, only, by using a Nilsonian illumination scheme in combination with a suitable aperture at the electron gun/monochromator assembly.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
H.A. Calderon, C. Kisielowski, P. Specht, B. Barton, F. Godinez-Salomon, O. Solorza-Feria,