Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7986895 | Micron | 2013 | 16 Pages |
Abstract
⺠Experimental measurements of scattering cross-sections in environmental scanning electron microscopy. ⺠Theoretical determination of scattering cross sections of gases as a function of accelerating voltage. ⺠Review of published work regarding scattering cross-sections. ⺠Scanned beam profiles across a clean edge of a dual Faraday cup provides a satisfactory method to measure electron scattering cross-sections in ESEM.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Gerasimos D. Danilatos,