Article ID Journal Published Year Pages File Type
7986895 Micron 2013 16 Pages PDF
Abstract
► Experimental measurements of scattering cross-sections in environmental scanning electron microscopy. ► Theoretical determination of scattering cross sections of gases as a function of accelerating voltage. ► Review of published work regarding scattering cross-sections. ► Scanned beam profiles across a clean edge of a dual Faraday cup provides a satisfactory method to measure electron scattering cross-sections in ESEM.
Related Topics
Physical Sciences and Engineering Materials Science Materials Science (General)
Authors
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