| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7987003 | Micron | 2013 | 8 Pages |
Abstract
⺠New approach to improve the spatial lateral resolution of the X-ray microanalysis and the backscattered electrons modes in variable pressure or environmental scanning electron microscope (VP-ESEM). ⺠Correlation between two concepts: the electron beam skirt radius and the generation volume radius of signals in the material. ⺠The existence of the best lateral resolution conditions named R (P, E) depending on the pressure and the energy for each material.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
A. Zoukel, L. Khouchaf, J.Di. Martino, D. Ruch,