| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7987029 | Micron | 2013 | 8 Pages |
Abstract
⺠BSE Autrata YAG detector is able to measure Pd particles with a diameter over 8 nm. ⺠The accuracy of Au and Pd nanoparticle measurements in TEM and FESEM was comparable. ⺠The accuracy of nanoparticle measurements is influenced by the size dispersion. ⺠Pd nanoparticles differing in size by 10 nm are distinguishable in BSE mode of FESEM.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Jana Nebesarova, Jan Langhans, Miroslav Slouf, Ewa Pavlova, Marie Vancova,