| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7987059 | Micron | 2013 | 8 Pages |
Abstract
⺠Conversion of a variable pressure (VP-SEM) type machine to an environmental scanning electron microscope (ESEM). ⺠Greatly improved imaging capability in the specified low vacuum (variable pressure) mode by extending the range of working distance possible and accelerating voltage down to a few keV. ⺠Possibility to operate the same instrument with a simple insert at the pole-piece up to a pressure of 1000 Pa. ⺠Further possibility to operate the same machine up to 2000 Pa or more by eliminating the existing diaphragm and use of a small single aperture at the bottom of the pole-piece.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Vassileios Dracopoulos, Gerasimos Danilatos,