| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7987514 | Nuclear Materials and Energy | 2017 | 4 Pages |
Abstract
Sputtering of Mo and Al (as Be proxy) in mixed D2/N2 DC glow discharge was studied in view of the first mirror performance. The composition of the working gas was varied from 100% D2 to 100% N2, while keeping a total pressure of 15Â Pa. The ion energies striking the sample surface were defined by its 100Â V biasing negative to a floating potential. It has been obtained that the sputtering yield of Mo and Al increases gradually with N2 concentration up to 4â16Â mol% and decreases with further N2 addition. In contrast, the sputtering yield of Be remains unchanged up to 10Â mol% of N2. Adding 16Â mol% leads to three-fold decrease in the sputtering rate. The sputtering behavior is discussed in context of surface data analysis and mass spectroscopy of the discharge gas exhaust. Variation in reflectivity of a single crystalline Mo due to plasma exposure under similar conditions is also presented and discussed.
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Physical Sciences and Engineering
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Nuclear Energy and Engineering
Authors
V.L. Bukhovets, A.E. Gorodetsky, R.Kh. Zalavutdinov, A.V. Markin, L.P. Kazansky, I.A. Arkhipushkin, A.P. Zakharov, A.M. Dmitriev, A.G. Razdobarin, E.E. Mukhin,