Epitaxial growth of SrRuO3 thin films with different orientation by chemical solution deposition

Epitaxial SrRuO3 (SRO) thin films have been prepared on (100), (110), and (111) LaAlO3 substrates by chemical solution deposition method, and the microstructures as well as the properties are investigated. The SRO (110) thin films display much more denser, homogeneous and well-connected grains. All the derived SRO thin films show a metallic behavior with low room-temperature resistivity (mΩ·cm). All derived SRO films are ferromagnetic at low temperatures showing different Curie temperature due to the different residual stain, and the SRO (110) film has the largest magnetization and coercivity due to the enhanced morphology. These results will provide a low-cost route to fabricate epitaxial SRO thin films with different orientation.