Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7998651 | Journal of Alloys and Compounds | 2015 | 6 Pages |
Abstract
Al doped ZnO (ZnO:Al) and Al-N co-doped ZnO (ZnO:Al-N) films were synthesized based on plasma assisted reactive deposition of ZnO matrix and in-situ doping of Al or co-doping of Al and N. Similar with undoped ZnO, the synthesized ZnO:Al and ZnO:Al-N films are hexagonal wurtzite in structure and exhibit high optical transparency in a wide spectral region. Al doping and Al-N co-doping in ZnO result in a significant variation of the optical properties in the ultraviolet (UV) region and an UV extension of the transparent range. Compared with undoped ZnO, the doped films show blue-shifted absorption edge of 320Â nm and widened band gap of 3.69Â eV after annealing in H2/N2 mixed gas because of the incorporation of dopants and the improvement in the crystal structure. The ZnO:Al film exhibits declined transparency in the near infrared (IR) region, while the ZnO film co-doped with Al and N preserves high transparency from near UV to medium IR in addition to the UV extension of the transparent range. The annealed ZnO:Al and ZnO:Al-N films show better electrical properties than those of the undoped ZnO film and the as-deposited doped ZnO films.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Qinghu You, Hua Cai, Zhigao Hu, Peipei Liang, Slawomir Prucnal, Shengqiang Zhou, Jian Sun, Ning Xu, Jiada Wu,