Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8003869 | Journal of Alloys and Compounds | 2012 | 5 Pages |
Abstract
It is well known that SiC nanoparticles are mainly prepared by a gas phase reaction involving thermal decomposition or by precursor methods. In this paper, we propose a new process of effectively preparing SiC nanoparticles through a reaction between nitrogen arc plasma and a solid SiC block or a mixture compact of Si and C powders. The solid SiC block is irradiated with nitrogen arc plasma containing various nitrogen partial pressures at a total pressure of 0.1Â MPa. The generation rate of SiC nanoparticles in 100% Ar plasma is negligible. However, the generation rate of SiC nanoparticles increases with increasing the nitrogen concentration in Ar. In the case of 100% nitrogen plasma, the generation rate has the highest value.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Hideo Okuyama, Sho Saito, Masahiro Uda, Takeshi Nakata, Yoshio Sakka,