Fe-Zr-N films: Effect of nitrogen content and nitrogen-to-zirconium concentration ratio on saturation induction

Films FexZr9Ny (x = 86 ÷ 77, y = 5 ÷ 14, at.%) prepared by rf reactive magnetron sputtering were used to study the effect of nitrogen content and nitrogen-to-zirconium concentration ratio on their phase composition and saturation induction Bs. It was shown that the films containing 9 at.% Zr and characterized by the nitrogen-to-zirconium ratio ≥1 have the two-phase structure, which forms during deposition and comprises α-Fe(N) solid solution and ZrN nitride. The Bs dependence on the nitrogen content in α-Fe(N) solid solution was found to be linear.