Modelling and simulation of structure surface generation using computer controlled ultra-precision polishing

The applications of structured surfaces have been more widespread. However, research on the fabrication of these surfaces is still far from complete. The paper presents a theoretical and experimental investigation of the generation of structured surfaces by using Computer Controlled Ultra-precision Polishing (CCUP). A surface topography simulation model and hence a model-based simulation system for the modelling and simulation of the generation of structure surfaces by using CCUP have been established and verified through a series of simulation and practical polishing experiments. The results of experiments demonstrate the capability of the model-based simulation system in predicting the form error and the pattern of the 3D-texture generated by using CCUP.

► The applications of structured surfaces possessing specially designed functional textures have been more widespread. ► A theoretical and experimental investigation of the generation of structured surfaces by using Computer Controlled Ultra-precision Polishing (CCUP) is conducted. ► A surface topography simulation model and a model-based simulation system have been established for the modelling and simulation of the generation of structure surfaces by using CCUP. ► The capability of the model and the system has been validated by a series of simulation and practical polishing experiments.