| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 801369 | Precision Engineering | 2011 | 8 Pages |
Abstract
⺠An abrasive-free polishing method utilizing vacuum ultraviolet light was developed. ⺠Electrolyzed water was focused as polishing fluid for final polishing of rolled Cu. ⺠Electrolyzed oxidized water was unsuitable because projections were grown. ⺠Projections were removed in the case of using electrolyzed reduced water. ⺠An ultra-flat and ultra-smooth surface was achieved using this polishing setup.
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Authors
Okiharu Kirino, Toshiyuki Enomoto,