Synthesis and characteristics of Ca-doped ZnO thin films by rf magnetron sputtering at low temperature

In the present work, we have deposited calcium doped zinc oxide (CZO) thin films by magnetron sputtering technique based nanocrystalline particles elaborated by sol-gel method. The nanoparticles were synthesized by sol-gel method using supercritical drying in ethyl alcohol. The structural studied by X-ray diffractometry indicates that calcium-doped zinc oxide has a polycrystalline hexagonal wurzite structure. Transmission electron microscopy (TEM) measurements have shown that very small particles of CZO are present in the aerogel powder. The transmittance of the ZnO:Ca films in the visible range was over 80%. The lowest resistivity for the films was about 5 × 10−3 Ω cm.