Article ID Journal Published Year Pages File Type
8015039 Materials Letters 2018 4 Pages PDF
Abstract
Long-term thermal stability of nickel line patterns was investigated. 5 μm-wide patterns and 20 μm-wide patterns were deposited with four different thicknesses, and their morphological change was compared after heat treatment. Displaced volume was calculated by post-annealing image analysis. Opposite coarsening trends were found for the two tested widths. 20 μm-wide patterns show deviation from predictions of previous models, but they still behave as expected: thinner pattern shows higher mobility. This is reversed for 5 μm-wide patterns. Surface tension at the metal-gas interface, the usual driving force behind coarsening, can still explain the unexpected displaced volume dependence on thickness.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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