Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8015039 | Materials Letters | 2018 | 4 Pages |
Abstract
Long-term thermal stability of nickel line patterns was investigated. 5â¯Î¼m-wide patterns and 20â¯Î¼m-wide patterns were deposited with four different thicknesses, and their morphological change was compared after heat treatment. Displaced volume was calculated by post-annealing image analysis. Opposite coarsening trends were found for the two tested widths. 20â¯Î¼m-wide patterns show deviation from predictions of previous models, but they still behave as expected: thinner pattern shows higher mobility. This is reversed for 5â¯Î¼m-wide patterns. Surface tension at the metal-gas interface, the usual driving force behind coarsening, can still explain the unexpected displaced volume dependence on thickness.
Keywords
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yong Hao, Yunyi Ling, Tae-Sik Oh,