Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8018366 | Materials Letters | 2015 | 4 Pages |
Abstract
TiO2 Thin films were deposited by RF magnetron sputtering on silicon dioxide substrates and irradiated using a KrF excimer laser. The effect of laser energy on the film has been systemically investigated by X-ray diffractometry, Raman spectral, X-ray photoelectron spectroscopy, and scanning electron microscopy. When the laser fluence was not higher than 0.3Â J/cm2, an obvious thermal effect of laser irradiation was observed. And with the laser fluence increasing to 1Â J/cm2, novel TiO2 nano-platelets were found on the surface because the laser induced plasma caused electron-ion emission from the TiO2 film surface. By increasing the laser fluence continually, the nano-platelets become sparse, which was due to the ion density in the plasma induced by laser.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Zifeng Zhang, Zhiwei Zhang, Xiaping Chen, Zhengyun Wu,