| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8022900 | Materials Letters | 2012 | 4 Pages |
Abstract
⺠The hysteretic curves of DC reactive sputtering with zinc target have been measured. ⺠The optimal deposition zone in the curve has been found. ⺠We have prepared high quality zinc oxide film according to optimal deposition zone.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Qing Wang, De-chun Ba, Yi-chen Zhang, Rong-heng Jiang,