Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8023821 | Surface and Coatings Technology | 2018 | 8 Pages |
Abstract
TiB2 films with various Cu contents were deposited on the single crystalline Si (100) wafers and SUS 304 stain steel substrates by a hybrid coating system combining high power impulse magnetron sputtering (HiPIMS) and pulsed direct current (PDC) magnetron sputtering. The Cu contents (0-19.2â¯at.%) in the films were controlled by changing the PDC sputtering power. The composition, microstructure and mechanical properties of TiB2-Cu films were systematically investigated in this work. The results indicated that the pure TiB2 film exhibited columnar structure and strong (0001) preferred orientation, whereas with Cu addition, the (0001) peak became broader and finally disappeared at Cu content of 11.9â¯at.%, suggesting the formation of nanocrystalline/amorphous tissue phase in films. The existing form of Cu was altered by increasing the Cu content. All the films demonstrated relatively smooth surfaces, confirmed through atomic force microscope (AFM) analysis, with average roughness of about ~3â¯nm. As the Cu content increased from 0 to 19.2â¯at.%, the hardness showed a significantly increment initially, due to the solid solution strengthening and formation of a nanocomposite structure, and then dramatically decreased from 32â¯GPa to 18â¯GPa, due to the excess softer amorphous Cu phase in the films. In addition, the resistance of the films with various Cu contents to cracking was investigated by exploring the surface morphology after Vickers indentation. The results proved that both hardness and toughness were enhanced by doping proper Cu contents.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Ji Cheng Ding, Teng Fei Zhang, Je Moon Yun, Kwang Ho Kim, Qi Min Wang,