| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8025293 | Surface and Coatings Technology | 2016 | 6 Pages |
Abstract
Nevertheless, there are distinct differences between the surface obtained by the CHF3 and SF6 treatments, respectively, the nature of which will be discussed in this paper, together with the underlaying mechanisms.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Wilhelm Kulisch, Alexandra Voss, Daniel Merker, Johann Peter Reithmaier, Rolf Merz, Michael Kopnarski, Cyril Popov,