Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8025996 | Surface and Coatings Technology | 2015 | 7 Pages |
Abstract
The microstructure, hardness and wear property of Mo-O-N films deposited at different oxygen gas flow rates, fO2, on SUS304 stainless steel were investigated. The hardness, H, of the film increased with increasing fO2 in a low fO2 region (fO2 â¤Â 0.05 sccm) and reached a maximum value of about 32 GPa because of grain refinement. With further increasing fO2, the H started to decrease due to the formation of the amorphous phase. Similarly, the effective Young's modulus, E*, of the film increased and then decreased with increasing fO2. It was found that the H/E* of the film could be enhanced by the addition of oxygen. The Mo-O-N film deposited at fO2 = 0.2 sccm showed lower H and E*, but much higher H/E* than Mo-N film because of its considerably lower E*, which was due to the formation of a crystalline/amorphous mixed structure. The film deposited at fO2 = 0.2 sccm with a crystalline/amorphous mixed structure showed the lowest μ in the present study and exhibited less frequent transverse cracking introduced by wear, as compared with that deposited at fO2 = 0.02 sccm with a fine grain crystalline microstructure. These results indicate that the formation of the crystalline/amorphous mixed structure in the Mo-O-N film is effective to enhance the elasticity of the film without the associated large loss of the H, which leads to low μ and good wear resistance on the stainless steel substrate.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Y. Sutou, S. Komiyama, M. Sonobe, D. Ando, J. Koike, M. Wang,