Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8027355 | Surface and Coatings Technology | 2014 | 10 Pages |
Abstract
The substrate bias does not influence the adhesion of the films to the high speed steel substrate, but influences the mechanical properties, particularly the hardness, at low P(N2Â +Â O2) regime. Films with higher crystallinity exhibit higher hardness, but in the low P(N2Â +Â O2) regime, those who were produced with polarization are harder. Although some dependence may be established for set B films, the hardness is not as influent on the wear resistance of the TaNxOy films as the friction coefficient.
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Authors
D. Cristea, A. Crisan, D. Munteanu, M. Apreutesei, M.F. Costa, L. Cunha,