Growth defect density in PVD hard coatings prepared by different deposition techniques

The influence of steel inclusions on coating growth was also analyzed. In order to understand the effects of different inclusions and other irregularities the substrate surface morphology was followed from the cleaning to ion etching and deposition. By transformation of the local (sample-based) coordinate system to the current instrumental coordinate system we were able to locate any defect and followed it through sample preparation. Shallow craters and voids were observed at positions of MnS inclusions, while the growth of TiAlN/CrN nanolayer coating on SiO2 inclusions was coherent.