Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8029952 | Surface and Coatings Technology | 2013 | 8 Pages |
Abstract
We report on the spatial and kinetic evolutions of telephone cord buckles existing in SiAlNx films sputtered on 6Â mm thick glass substrates. The experiment shows that the telephone cord buckles propagate from the film edges to the central regions after annealing. During propagation, the already formed buckle undergoes a reorganization process and it can expand in the longitudinal, transverse and normal directions simultaneously. As a result, various morphological parameters (including wavelength, amplitude, width, maximum deflection etc.) evolve obviously both in spatial scale and time scale, which have been measured and analyzed in detail. The internal stress of the film is also evaluated based on the continuum elastic theory.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Sen-Jiang Yu, Miao-Gen Chen, Jun Chen, Hong Zhou, Yong-Ju Zhang, Ping-Zhan Si,