| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030098 | Surface and Coatings Technology | 2013 | 4 Pages |
Abstract
⺠(TiVCrZrHf)N coatings were prepared by magnetron sputtering. ⺠Using appropriate process parameters, a thick amorphous layer was formed. ⺠Preferred orientation evolved from (200) to (220) as coating thickness increased.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Du-Cheng Tsai, Zue-Chin Chang, Li-Yu Kuo, Tien-Jen Lin, Tai-Nan Lin, Fuh-Sheng Shieu,