| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030293 | Surface and Coatings Technology | 2013 | 6 Pages |
Abstract
⺠Effect of hydrogen on the residual stress developed in B-C-N film is investigated. ⺠Compositionally graded B-C-N interlayer and hBN/cBN phases compose the B-C-N film. ⺠Hydrogen drastically reduced the compressive residual stress of the B-C-N film. ⺠cBN content in the B-C-N film is slightly changed by the addition of hydrogen. ⺠Hydrogen inhibits the ability of Ar ions to penetrate into the space of B-C-N film.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jong-Keuk Park, Ji-Sun Ko, Young-Joon Baik,