| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030321 | Surface and Coatings Technology | 2013 | 8 Pages |
Abstract
⺠TiSiN and TiSiCN nanocomposite coatings were synthesized by CVD. ⺠New LPCVD processes at moderate temperatures were applied. ⺠Coatings show high hardness of 3700 HV[0.01] for TiSiN and 4100 HV[0.01] for TiSiCN. ⺠TiSiCN shows a high oxidation resistance up to 900 °C.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Ingolf Endler, M. Höhn, J. Schmidt, S. Scholz, M. Herrmann, M. Knaut,