Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8030352 | Surface and Coatings Technology | 2013 | 6 Pages |
Abstract
⺠Pulsed reactive magnetron deposition of two new nanocrystalline and multifunctional Zr-B-C-N films. ⺠Hard (37 GPa) Zr25B57C14N3 films with low electrical resistivity of 2.3 Ã 10-6 Ωm and high oxidation resistance up to 650 °C. ⺠Hard (37 GPa) Zr41B30C8N20 films with low electrical resistivity of 1.7 Ã 10-6 Ωm and high oxidation resistance up to 550 °C.
Keywords
Related Topics
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Nanotechnology
Authors
J. VlÄek, P. Steidl, J. Kohout, R. Äerstvý, P. Zeman, Å . ProkÅ¡ová, V. PeÅina,