| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030428 | Surface and Coatings Technology | 2013 | 8 Pages |
Abstract
⺠We deposited thick tantalum coatings by modulated pulsed power magnetron sputtering. ⺠We deposited α-Ta coatings without substrate heating or annealing. ⺠The β â α-Ta phase change is an abrupt transition, not a complete phase transformation. ⺠There is an abrupt β â α phase transition once the coating is 5-7 μm. ⺠Thermocouple measurements show that β-Ta is no longer stable above 365-375 °C.
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Authors
Sterling Myers, Jianliang Lin, Roberto Martins Souza, William D. Sproul, John J. Moore,