| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030486 | Surface and Coatings Technology | 2013 | 6 Pages |
Abstract
⺠High-quality epitaxial TiNxOy films with different oxygen content are successfully grown on MgO(001) substrates. ⺠The TiNxOy films contain a low density of defects. ⺠The lattice parameters of TiNxOy decrease with increased oxygen concentration. ⺠The TiNxOy films are very electrically conducting with resistivity of 28-33 μΩ cm. ⺠The TiNxOy films show the hardness and Young's modulus of about 23-26 GPa and 400-430 GPa, respectively.
Related Topics
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Authors
Hien Do, Yue-Han Wu, Van-Truong Dai, Chun-Yen Peng, Tzu-Chun Yen, Li Chang,