| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030489 | Surface and Coatings Technology | 2013 | 7 Pages |
Abstract
⺠DLC and Si-DLC with low hydrogen contents of 10 at.% and 6 at.% were deposited. ⺠A clear influence of hydrogen on mechanical properties of DLC coatings is shown. ⺠Si-DLC/DLC films of 30 GPa hardness and friction coefficient of 0.07 were achieved. ⺠Thermal stability up to 500 °C was achieved by adding Si to DLC coatings.
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Authors
D. Hofmann, S. Kunkel, K. Bewilogua, R. Wittorf,