| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030536 | Surface and Coatings Technology | 2013 | 7 Pages |
Abstract
⺠The Tg in PECVD was confirmed to be an important parameter. ⺠Tg limits the incorporation of hydrogen bonded in the shape of polyhydrides. ⺠The enhancements of conductivity of samples depend strongly on their structures. ⺠The grown thin films have been examined using multiple characterization techniques.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jian He, Chong Wang, Wei Li, Kang-cheng Qi, Ya-Dong Jiang,