| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030594 | Surface and Coatings Technology | 2013 | 5 Pages |
Abstract
⺠A-C:H films were synthesized by AP-PECVD method from C2H2 diluted with N2. ⺠Hardness increased up to 0.92 GPa as pulse frequency decreased to 2 kHz. ⺠Surface roughness and N/C molar ratio decreased by decreasing pulse frequency. ⺠Smooth-surface film densely packed with particles led to high hardness.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
T. Sakurai, M. Noborisaka, T. Hirako, A. Shirakura, T. Suzuki,