Article ID Journal Published Year Pages File Type
8030668 Surface and Coatings Technology 2012 7 Pages PDF
Abstract
► The structure for the NbC films depends strongly on the substrate bias voltage. ► The mechanical properties of NbC films are strongly dependent on the bias voltage. ► The tribological behavior of niobium carbide films was investigated. ► The NbC film is a potential material for protective coating.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Effects of substrate bias voltage on the microstructure, mechanical properties and tribological behavior of reactive sputtered niobium carbide films
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