Article ID Journal Published Year Pages File Type
8030705 Surface and Coatings Technology 2012 5 Pages PDF
Abstract
► a-CNx films are promising candidates for a number of mechanical and electronic applications. ► The deposition conditions affect morphological characteristics of the telephone-cord buckling. ► This approach can be considered as a significant step to control the formation of these patterns.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Effect of the deposition gas pressure on the structure and mechanical stability of sputtered amorphous carbon nitride films
Authors
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